Digitální knihovnaUPCE
 

Selective etching of spin-coated and thermally evaporated As30S45Se25 thin films

Článekpeer-reviewedpostprint

Abstrakt

Chalcogenide glasses are intensively studied materials due to their interesting optical properties such as high values of refractive index, wide transparency in IR, photosensitivity, etc.We report on the comparison of photo and thermo-induced changes in optical properties and chemical resistance of thermally evaporated and spincoated As30S45Se25 thin films. Significantly different trends of photo-induced changes in chemical resistance in both types of thin films such as negative etching of thermally evaporated thin films and positive etching of spin-coated thin films were observed. The structural changes responsible for the observed phenomena were investigated as well.

Rozsah stran

p. 104-109

ISSN

0022-3093

Trvalý odkaz na tento záznam

Projekt

Zdrojový dokument

Journal of Non-Crystalline Solids, volume 447, issue: September 2016

Vydavatelská verze

Přístup k e-verzi

embargoed access

Název akce

ISBN

Studijní obor

Studijní program

Signatura tištěné verze

Umístění tištěné verze

Přístup k tištěné verzi

Klíčová slova

Chalcogenide glasses, Selective etching, Thin films, Chalkogenidová skla, selektivní leptání, tenké vrstvy

Endorsement

Review

item.page.supplemented

item.page.referenced