Publikace: Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis
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Rodriguez Pereira, Jhonatan
Zazpe, Raul
Charvot, Jaroslav
Bureš, Filip
Macák, Jan
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Nakladatel
American Institute of Physics
Abstrakt
Molybdenum diselenide (MoSe2) thin films were deposited on annealed titanium foils by atomic layer deposition using suitable precursors. In this paper, a detailed x-ray photoelectron spectroscopy analysis of the MoSe2 film is presented. Survey spectra, Mo 3d, Se 3d, Mo 3p, Se LMM, Se 3p, C 1s, and Se 4s core level along with the valence band spectra were measured. Quantitative analysis indicates a surface composition of MoSe1.8, suggesting a deficiency of selenium on the surface.
Popis
Klíčová slova
MoSe2, transition metal dichalcogenides, thin films, 2D material, XPS, MoSe2, dichalkogenidy přechodných prvků, tenké vrstvy, 2D materiály, XPS