We report on the uniform anti-reflection coating of TiO2 nanotube layers with a secondary material – indium trioxide (In2O3) – by Atomic Layer Deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nano-tubes for three different tube layers with aspect ratio up to ≈80, which is so far the highest aspect ratio reported for ALD-processed self-organized anodic TiO2 nanotubes. We show that uniform In2O3 coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In2O3.
eng
dc.format
p. 516-520
eng
dc.language.iso
eng
dc.publisher
Wiley-VCH
cze
dc.relation.ispartof
Physica Status Solidi (RRL) - Rapid Research Letter. 2015, vol. 9, issue 9
eng
dc.rights
open access
eng
dc.subject
TiO2 nanotubes
eng
dc.subject
In2O3
eng
dc.subject
antireflection coating
eng
dc.subject
atomic laser deposition
eng
dc.subject
light absorption
eng
dc.title
Antireflection ln2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition