Antireflection ln2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition

Macák, Jan M.; Přikryl, Jan; Sopha, Hanna Ingrid; Střižík, Lukáš

Antireflection ln2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition

Macák, Jan M.; Přikryl, Jan; Sopha, Hanna Ingrid; Střižík, Lukáš

10.1002/pssr.201510245

Soubory tohoto záznamu

URI: http://hdl.handle.net/10195/61979

Datum publikování: 2015

Typ dokumentu: Article

Zdrojový dokument: Physica Status Solidi (RRL) - Rapid Research Letter. 2015, vol. 9, issue 9

ISSN: 1862-6270

Vydavatelská verze: http://onlinelibrary.wiley.com/doi/10.1002/pssr.201510245/abstract

Abstrakt:

We report on the uniform anti-reflection coating of TiO2 nanotube layers with a secondary material – indium trioxide (In2O3) – by Atomic Layer Deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nano-tubes for three different tube layers with aspect ratio up to ≈80, which is so far the highest aspect ratio reported for ALD-processed self-organized anodic TiO2 nanotubes. We show that uniform In2O3 coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In2O3.

Zobrazit celý záznam