Selective etching of spin-coated and thermally evaporated As30S45Se25 thin films

Abstract

Chalcogenide glasses are intensively studied materials due to their interesting optical properties such as high values of refractive index, wide transparency in IR, photosensitivity, etc.We report on the comparison of photo and thermo-induced changes in optical properties and chemical resistance of thermally evaporated and spincoated As30S45Se25 thin films. Significantly different trends of photo-induced changes in chemical resistance in both types of thin films such as negative etching of thermally evaporated thin films and positive etching of spin-coated thin films were observed. The structural changes responsible for the observed phenomena were investigated as well.