Application of imaging spectroscopic reflectometry for characterization of gold reduction from organometallic compound by means of plasma jet technology

Abstract

This work presents a new application of imaging spectroscopic reflectometry to determine a distributionof metallic gold in a layer of an organogold precursor which was treated by a plasma jet. Gold layers wereprepared by spin coating from a solution of the precursor containing a small amount of polyvinylpyrroli-done on a microscopy glass, then they were vacuum dried. A difference between reflectivity of metallicgold and the precursor was utilized by imaging spectroscopic reflectometry to create a map of metal-lic gold distribution using a newly developed model of the studied sample. The basic principle of theimaging spectroscopic reflectometry is also shown together with the data acquisition principles. XPSmeasurements and microscopy observations were made to complete the imaging spectroscopic reflec-tometry results. It is proved that the imaging spectroscopic reflectometry represents a new method forquantitative evaluation of local reduction of metallic components from metaloorganic compounds.