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Browsing by Subject "vícezdrojové naprašování"

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Title: Tailoring of Multisource Deposition Conditions towards Required Chemical Composition of Thin Films Type: article Author: Gutwirth, Jan; Kotrla, Magdaléna; Halenkovič, Tomáš; Nazabal, Virginie; Němec, Petr Date: 2022

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