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Browsing by Subject "remote-plasma reactive sputtering"

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Title: Spectroscopic ellipsometry characterization of ZnO:Sn thin films with various Sn composition deposited by remote-plasma reactive sputtering Type: article Author: Janíček, Petr; Niang, Kham; Mistrík, Jan; Pálka, Karel; Flewitt, Andrew Date: 2017

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