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Browsing by Subject "depozice atomových vrstev"

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Title: Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition Type: article Author: Charvot, Jaroslav; Pokorný, Daniel; Zazpe, Raul; Krumpolec, Richard; Pavliňák, David; Hromádko, Luděk; Přikryl, Jan; Rodriguez Pereira, Jhonatan; Klikar, Milan; Jelínková, Veronika; Macák, Jan; Bureš, Filip Date: 2020

Title: Influence of post-annealing on structural, optical and electrical properties of tin nitride thin films prepared by atomic layer deposition Type: article Author: Ansari, Mohd Zahid; Janíček, Petr; Nandi, Dip K; Pálka, Karel; Šlang, Stanislav; Kim, Deok Hyun; Cheon, Taehoon; Kim, Soo-Hyun Date: 2021

Title: Low-temperature growth of crystalline Tin(II) monosulfide thin films by atomic layer deposition using a liquid divalent tin precursor Type: article Author: Ansari, Mohd Zahid; Janíček, Petr; Nandi, Dip K; Šlang, Stanislav; Bouška, Marek; Oh, Hongjun; Shong, Bonggeun; Kim, Soo-Hyun Date: 2021

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